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Portrait photo

Haein Cho

Associate Senior Lecturer

Portrait photo

Overview of F-GHG and Nitrous Oxide Semiconductor Abatement Technologies

Author

  • Joshua Robbins
  • Monique Mcintosh
  • Peilun Sun

Other contributions

  • Klaus Kuemmerle
  • Guy Davies
  • David Williams
  • Yu Jun Leong
  • Sebastian Oberbeck
  • Haein Cho
  • Daeok Kim

Publishing year

2025

Language

English

Document type

Report

Publisher

SEMI

Status

Published